Fluctuations in electron cyclotron resonance plasma in a divergent magnetic field
نویسندگان
چکیده
منابع مشابه
Characterization of the Magnetic-Field Parameters of an Electron Cyclotron Resonance Plasma System
Semiconductor Research Corporation under contract no 2008-KJ-1871 Abstract—The magnetic field in an electron cyclotron resonance plasma processing system was characterized using IEEE standard measurement practices. We discuss methods for a low-cost Hall-effect sensor array construction, calibration, and measurement collection to meet or exceed available standards. Utilizing standard measurement...
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ژورنال
عنوان ژورنال: Physics of Plasmas
سال: 2016
ISSN: 1070-664X,1089-7674
DOI: 10.1063/1.4941595